The Japan Society of Applied Physics

[PS-8-18] Behavior of Focused Ga+ Beam Spot Milling and its Superimposition Propetry

H.M. Chen1, P.J. Wu2, K.Y. Shen1, C.H. Kuan1,2 (1.Graduate Inst. of Electronics Engineering, National Taiwan Univ., 2.Graduate Inst. of Biomedical Electronics and Bioinformatics, National Taiwan Univ. (Taiwan))

https://doi.org/10.7567/SSDM.2014.PS-8-18