[PS-8-18] Behavior of Focused Ga⁺ Beam Spot Milling and its Superimposition Propetry

H.M. Chen¹、P.J. Wu²、K.Y. Shen¹、C.H. Kuan^1,2 (1.Graduate Inst. of Electronics Engineering, National Taiwan Univ.、2.Graduate Inst. of Biomedical Electronics and Bioinformatics, National Taiwan Univ. (Taiwan))

https://doi.org/10.7567/SSDM.2014.PS-8-18