Soft X-ray Crystallization of Si<sub>1-x</sub>Ge<sub>x</sub> Multilayer Films

A. Heya; F. Kusakabe; N. Matsuo; K. Kanda; T. Motizuki; M. Takahashi; K. Ito

doi:https://doi.org/10.7567/SSDM.2014.PS-8-4

2014 International Conference on Solid State Devices and Materials

Sep 8, 2014 - Sep 11, 2014
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[PS-8-4] Soft X-ray Crystallization of Si_1-xGe_x Multilayer Films

A. Heya¹, F. Kusakabe¹, N. Matsuo¹, K. Kanda², T. Motizuki², M. Takahashi³, K. Ito³ (1.Univ. of Hyogo, 2.LASTI, Univ. of Hyogo, 3.Osaka Univ. (Japan))

https://doi.org/10.7567/SSDM.2014.PS-8-4

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2014 International Conference on Solid State Devices and Materials

[PS-8-4] Soft X-ray Crystallization of Si1-xGex Multilayer Films

[PS-8-4] Soft X-ray Crystallization of Si_1-xGe_x Multilayer Films