[PS-8-9] Growth of V-doped ZnO Thin Films with Two-layer Structure on a-Al₂O₃ by RF Magnetron Sputtering

H. Chiba¹、T. Kawashima¹、K. Washio¹ (1.Tohoku Univ. (Japan))

https://doi.org/10.7567/SSDM.2014.PS-8-9