The Japan Society of Applied Physics

2014 International Conference on Solid State Devices and Materials

2014 International Conference on Solid State Devices and Materials

Sep 8, 2014 - Sep 11, 2014
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[PS-9-6] Performance Enhancement of Colloidal Synthesis-Coated Au-Nanoparticle Nonvolatile Memory with Low Damage NH3 Plasma Treatment on SiO2 Tunneling Layer

C. Liao1, Y. Liu1, J. Wang1, L. Chang2, C. Lai1 (1.Chang Gung Univ., 2.Ming Chi Univ. of Tech. (Taiwan))

https://doi.org/10.7567/SSDM.2014.PS-9-6