[PS-9-6] Performance Enhancement of Colloidal Synthesis-Coated Au-Nanoparticle Nonvolatile Memory with Low Damage NH₃ Plasma Treatment on SiO₂ Tunneling Layer

C. Liao¹、Y. Liu¹、J. Wang¹、L. Chang²、C. Lai¹ (1.Chang Gung Univ.、2.Ming Chi Univ. of Tech. (Taiwan))

https://doi.org/10.7567/SSDM.2014.PS-9-6