[PS-9-8] Fabrication of 10-nm-Scale Nanoconstrictions in graphene using AFM-Based Local Anodic Oxidation Lithography
M. Arai1、S. Masubuchi1,2、K. Nose1、Y. Mitsuda1、T. Machida1,2
(1.IIS, Univ. of Tokyo、2.INQIE, Univ. of Tokyo (Japan))
https://doi.org/10.7567/SSDM.2014.PS-9-8