Room Temperature Operation of GaAs/AlGaAs Quantum Nanodisks Light Emitting Diodes Fabricated by Fusion of Bio-Template and Neutral Beam Etching

Y. C. Lai

doi:https://doi.org/10.7567/SSDM.2015.A-1-4

3:00 PM - 3:15 PM

[A-1-4] Room Temperature Operation of GaAs/AlGaAs Quantum Nanodisks Light Emitting Diodes Fabricated by Fusion of Bio-Template and Neutral Beam Etching

^○Y. C. Lai^1,2, A. Higo², C. Thomas², T. Kiba³, J. Takayama³, M. Sugiyama⁴, Y. Nakano⁴, P. Yu¹, A. Murayama³, S. Samukawa^1,2 (1.National Chiao Tung Univ., 2.Tohoku Univ., 3.Hokkaido Univ., 4.Univ. of Tokyo(Taiwan))

https://doi.org/10.7567/SSDM.2015.A-1-4

2015 International Conference on Solid State Devices and Materials

[A-1-4] Room Temperature Operation of GaAs/AlGaAs Quantum Nanodisks Light Emitting Diodes Fabricated by Fusion of Bio-Template and Neutral Beam Etching