09:30 〜 09:45

[A-3-2] High-Performance MOS Capacitor Type Si Optical Modulator, and Surface Illumination-type Ge Photodetector for Optical Interconnection

^○J. Fujikata¹, S. Takahashi¹, M. Takahashi², M. Noguchi¹, M. Miura¹, T. Nakamura¹, Y. Arakawa³ (1.PETRA, 2.AIST, 3.Univ. of Tokyo(Japan))

https://doi.org/10.7567/SSDM.2015.A-3-2