The Japan Society of Applied Physics

09:30 〜 09:45

[A-3-2] High-Performance MOS Capacitor Type Si Optical Modulator, and Surface Illumination-type Ge Photodetector for Optical Interconnection

J. Fujikata1, S. Takahashi1, M. Takahashi2, M. Noguchi1, M. Miura1, T. Nakamura1, Y. Arakawa3 (1.PETRA, 2.AIST, 3.Univ. of Tokyo(Japan))

https://doi.org/10.7567/SSDM.2015.A-3-2