17:40 〜 17:55

[A-5-2] Suspended Ge Cross-shaped Microstructures for Enhancing Biaxial Tensile Strain

^○S. Ishida¹, S. Kako¹, K. Oda², T. Ido², S. Iwamoto¹, Y. Arakawa¹ (1.Univ. of Tokyo, 2.Hitachi Ltd.(Japan))

https://doi.org/10.7567/SSDM.2015.A-5-2