17:55 〜 18:10

[A-5-3] Crystallinity Improvement of Ge Waveguides Fabricated by Epitaxial Lateral Overgrowth and Chemical Mechanical Polishing

^○K. Oda¹, T. Okumura¹, J. Kasai¹, S. Kako², S. Iwamoto², Y. Arakawa² (1.Hitachi Ltd., 2.Univ. of Tokyo(Japan))

https://doi.org/10.7567/SSDM.2015.A-5-3