11:45 AM - 12:00 PM

[C-7-5] Catalytic Doping of Phosphorus and Boron Atoms onto Hydrogenated Amorphous Silicon Films

^○J. Seto^1,2, K. Ohdaira^1,2, H. Matsumura^1,2 (1.JAIST, 2.JST-CREST, (Japan))

https://doi.org/10.7567/SSDM.2015.C-7-5