12:00 〜 12:15

[D-7-5] Formation of Self-aligned Pore Arrays on n-GaN Substrates by Photo-assisted Electrochemical Etching Process

^○Y. Kumazaki¹, T. Sato¹, Z. Yatabe¹ (1.Hokkaido Univ.(Japan))

https://doi.org/10.7567/SSDM.2015.D-7-5