Robustness of Integrated Stoppers for MEMS Accelerometer Fabricated by Multi-ｌayered Metal Technology

D. Yamane

doi:https://doi.org/10.7567/SSDM.2015.E-4-4L

16:40 〜 16:55

[E-4-4L] Robustness of Integrated Stoppers for MEMS Accelerometer Fabricated by Multi-ｌayered Metal Technology

^○D. Yamane^1,4, T. Konishi², M. Takayasu^1,4, T. Safu², H. Toshiyoshi^3,4, M. Sone^1,4, K. Masu^1,4, K. Machida^1,2,4 (1.Tokyo Tech, 2.NTT Adv. Tech. Corp., 3.Univ. of Tokyo, 4.JST-CREST(Japan))

https://doi.org/10.7567/SSDM.2015.E-4-4L

2015 International Conference on Solid State Devices and Materials

[E-4-4L] Robustness of Integrated Stoppers for MEMS Accelerometer Fabricated by Multi-ｌayered Metal Technology