Novel Gain-Controlled Sensor Circuits Designed by Multi-physics Simulation for CMOS-MEMS Accelerometer

T. Konishi

doi:https://doi.org/10.7567/SSDM.2015.E-7-2

11:15 〜 11:35

[E-7-2] Novel Gain-Controlled Sensor Circuits Designed by Multi-physics Simulation for CMOS-MEMS Accelerometer

^○T. Konishi¹, D. Yamane^2,4, M. Takayasu^2,4, S. Dosho^2,4, N. Ishihara^2,4, K. Masu^2,4, H. Toshiyoshi^3,4, K. Machida^1,2,4 (1.NTT Advanced Tech. Corp., 2.Tokyo Tech, 3.Univ. of Tokyo, 4.JST-CREST(Japan))

https://doi.org/10.7567/SSDM.2015.E-7-2

2015 International Conference on Solid State Devices and Materials

[E-7-2] Novel Gain-Controlled Sensor Circuits Designed by Multi-physics Simulation for CMOS-MEMS Accelerometer