11:35 AM - 11:55 AM

[E-7-3] Zeolite-trench-embedded Micro Cantilevers for CMOS Strain-gauge Integrated Gas Sensors

^○S. Inoue¹, R. Setoguchi¹, M. Denoual², S. Mintova², Y. Mita¹ (1.Univ. of Tokyo, 2.Univ. of Normandie(Japan))

https://doi.org/10.7567/SSDM.2015.E-7-3