18:25 〜 18:40 [F-5-4] Biosensing by Differential Si Ring Resonators Robust to Process Variations ○T. Taniguchi1, S. Yokoyama1, Y. Amemiya1, T. Ikeda1, A. Kuroda1, S. Yokoyama1 (1.Hiroshima Univ.(Japan)) https://doi.org/10.7567/SSDM.2015.F-5-4