15:15 〜 15:30

[G-1-5] Novel Evaluation Technique of GaN Surfaces Using Laser-induced Terahertz Emission

^○Y. Sakai¹, I. Kawayama¹, H. Nakanishi², M. Tonouchi¹ (1.Osaka Univ., 2.SCREEN Holdings Co., Ltd.(Japan))

https://doi.org/10.7567/SSDM.2015.G-1-5