(Invited) Crystal Growth of GeSn-related Group-IV Thin Films for Integrating on Si Nanoelectronics Platform

S. Zaima

doi:https://doi.org/10.7567/SSDM.2015.G-4-1

15:40 〜 16:10

[G-4-1] (Invited) Crystal Growth of GeSn-related Group-IV Thin Films for Integrating on Si Nanoelectronics Platform

^○S. Zaima^1,2, O. Nakatsuka², T. Asano^2,3, T. Yamaha^2,3, S. Ike^2,3, A. Suzuki², M. Kurosawa^1,2,4, W. Takeuchi², M. Sakashita² (1.EcoTopia Sci. Inst., Nagoya Univ., 2.Grad. Sc. Eng., Nagoya Univ., 3.JSPS Reserach Fellow, 4.Inst.Adv. Res., Nagoya Univ.(Japan))

https://doi.org/10.7567/SSDM.2015.G-4-1

2015 International Conference on Solid State Devices and Materials

[G-4-1] (Invited) Crystal Growth of GeSn-related Group-IV Thin Films for Integrating on Si Nanoelectronics Platform