The Japan Society of Applied Physics

17:55 〜 18:10

[G-5-3] Thermally-Stable High Sn Concentration (~9%) GeSn on Insulator by Ultra-Low Temperature (~180°C) Solid-Phase Crystallization Triggered by Laser-Anneal Seeding

R. Matsumura1,2, K. Moto1, Y. Kai1, T. Sadoh1, H. Ikenoue1, M. Miyao1 (1.Kyushu Univ., 2.JSPS Research Fellow(Japan))

https://doi.org/10.7567/SSDM.2015.G-5-3