5:55 PM - 6:10 PM

[G-5-3] Thermally-Stable High Sn Concentration (~9%) GeSn on Insulator by Ultra-Low Temperature (~180°C) Solid-Phase Crystallization Triggered by Laser-Anneal Seeding

^○R. Matsumura^1,2, K. Moto¹, Y. Kai¹, T. Sadoh¹, H. Ikenoue¹, M. Miyao¹ (1.Kyushu Univ., 2.JSPS Research Fellow(Japan))

https://doi.org/10.7567/SSDM.2015.G-5-3