09:50 〜 10:10

[K-3-3] Quantitative Understanding of Scanning Spreading Resistance Microscopy with Schottky Contact Model

^○S. Itai¹, L. Zhang¹, K. Matsuzawa¹, M. Ono¹, T. Ishihara¹ (1.Toshiba Corp.(Japan))

https://doi.org/10.7567/SSDM.2015.K-3-3