The Japan Society of Applied Physics

11:45 〜 12:05

[K-7-4] Impact of Hole Shape on Program Vt Distribution in Gate-All-Around 3D Flash Memory

C. H. Cheng1, C. W. Lee1, K. W. Wu1, S. H. Ku1, N. K. Zous1, L. Liu1, S. W. Huang1, Y. W. Chang1, I. J. Huang1, A. Suzuki1, T. C. Lu1, W. P. Lu1, ChenK. C. 1 (1.Macronix Int'l. Co., Ltd.(Taiwan))

https://doi.org/10.7567/SSDM.2015.K-7-4