Improved Performance of &#945;-IGZO Thin-Film Transistors with an Au/HfSiO/IGZO(O<sub>2</sub>-rich) Schottky Source

C. H. Hung

doi:https://doi.org/10.7567/SSDM.2015.M-6-1

2015 International Conference on Solid State Devices and Materials

2015年9月27日〜 2015年9月30日
Sapporo Convention Center, Sapporo, Japan

09:00 〜 09:15

[M-6-1] Improved Performance of α-IGZO Thin-Film Transistors with an Au/HfSiO/IGZO(O₂-rich) Schottky Source

^○C. H. Hung¹, S. J. Wang¹, Y. H. Chen¹, C. H. Wu², C. Lin¹, P. Y. Liu¹, Y. C. Tu¹, T. H. Lin¹ (1.National Cheng Kung Univ., 2.Chung Hua Univ.(Taiwan))

https://doi.org/10.7567/SSDM.2015.M-6-1

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2015 International Conference on Solid State Devices and Materials

[M-6-1] Improved Performance of α-IGZO Thin-Film Transistors with an Au/HfSiO/IGZO(O2-rich) Schottky Source

[M-6-1] Improved Performance of α-IGZO Thin-Film Transistors with an Au/HfSiO/IGZO(O₂-rich) Schottky Source