The Japan Society of Applied Physics

09:15 〜 09:30

[M-6-2] Correlation between Crystallinity and Formation of Oxygen Vacancies in IGZO - Comparison between Crystal and Amorphous Using First-Principles Calculations -

T. Hiramatsu1, M. Nakashima1, E. Kikuchi1, N. Ishihara1, M. Tsubuku1, K. Dairiki1, S. Yamazaki1 (1.Semiconductor Energy Laboratory Co., Ltd.(Japan))

https://doi.org/10.7567/SSDM.2015.M-6-2