2015 International Conference on Solid State Devices and Materials

Sep 27, 2015 - Sep 30, 2015
Sapporo Convention Center, Sapporo, Japan

10:10 AM - 10:30 AM

[N-3-4] Comprehensive Understanding of SiO₂-IL Scavenging in HfO₂/SiO₂/Si Stack

X. Li¹, T. Yajima¹, T. Nishimura¹, ^○A. Toriumi¹ (1.Univ. of Tokyo(Japan))

https://doi.org/10.7567/SSDM.2015.N-3-4

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