3:40 PM - 4:00 PM

[N-4-1] Beyond GeO₂ on Ge: Network Modification of GeO₂ for Reliable Ge Gate Stacks

^○C. Lu¹, C. H. Lee¹, T. Nishimura¹, A. Toriumi¹ (1.Univ of Tokyo(Japan))

https://doi.org/10.7567/SSDM.2015.N-4-1