The Japan Society of Applied Physics

18:35 〜 18:55

[O-5-4] Optimization of CoFeB Capping Layer Thickness for Characterization of Leakage Spot in MgO Tunneling Barrier of Magnetic Tunnel Junction

S. Sato1,6, H. Honjo1,6, S. Ikeda1,2,3,6, H. Ohno1,2,3,4, T. Endoh1,2,5,6, M. Niwa1,6 (1.CIES, Tohoku Univ., 2.CSIS, Tohoku Univ., 3.RIEC, Tohoku Univ., 4.WPI-AIMR, Tohoku Univ., 5.Gradaute School of Eng., Tohoku Univ., 6.JST-ACCEL(Japan))

https://doi.org/10.7567/SSDM.2015.O-5-4