18:35 〜 18:55

[O-5-4] Optimization of CoFeB Capping Layer Thickness for Characterization of Leakage Spot in MgO Tunneling Barrier of Magnetic Tunnel Junction

^○S. Sato^1,6, H. Honjo^1,6, S. Ikeda^1,2,3,6, H. Ohno^1,2,3,4, T. Endoh^1,2,5,6, M. Niwa^1,6 (1.CIES, Tohoku Univ., 2.CSIS, Tohoku Univ., 3.RIEC, Tohoku Univ., 4.WPI-AIMR, Tohoku Univ., 5.Gradaute School of Eng., Tohoku Univ., 6.JST-ACCEL(Japan))

https://doi.org/10.7567/SSDM.2015.O-5-4