The Japan Society of Applied Physics

10:10 〜 10:30

[O-6-4] A New High Density FinFET OTP Technology

P. C. Peng1, Y. Z. Chen1, H. W. Pan1, W. Y. Hsiao2, K. H. Chen2, Y. H. Kuo2, C. P. Lin2, B. Z. Tien2, T. S. Chang2, Y. C. King1, C. J. Lin1 (1.National Tsing Hua Univ., 2.TSMC(Taiwan))

https://doi.org/10.7567/SSDM.2015.O-6-4