10:10 〜 10:30
[O-6-4] A New High Density FinFET OTP Technology
P. C. Peng1, ○Y. Z. Chen1, H. W. Pan1, W. Y. Hsiao2, K. H. Chen2, Y. H. Kuo2, C. P. Lin2, B. Z. Tien2, T. S. Chang2, Y. C. King1, C. J. Lin1
(1.National Tsing Hua Univ., 2.TSMC(Taiwan))
https://doi.org/10.7567/SSDM.2015.O-6-4