[PS-1-14] Observation of Plastic and Elastic Deformations in Ge Films of Bonded GeOI

^○T. Nishimura¹, T. Nakamura¹, T. Yajima¹, A. Toriumi¹ (1.Univ. of Tokyo(Japan))

https://doi.org/10.7567/SSDM.2015.PS-1-14