[PS-1-15] Formation of Single Crystalline Silicon with Midair Cavity for Meniscus Force-Mediated Local Layer Transfer and Fabrication of High-Performance MOSFETs on Insulator

^○M. Akazawa¹, S. Takeshima¹, A. Nakagawa¹, K. Hiramatsu¹, S. Higashi¹ (1.Hiroshima Univ.(Japan))

https://doi.org/10.7567/SSDM.2015.PS-1-15