The Japan Society of Applied Physics

[PS-1-20L] New Structural Properties of Ferroelectric Y2O3-doped HfO2 Films Probed by Microscopic Raman Spectroscopy Measurements

K. Izukashi1,2, T. Nishimura1,2, S. Migita2,3, A. Toriumi1,2 (1.Univ. of Tokyo, 2.AIST, 3.JST-CREST(Japan))

https://doi.org/10.7567/SSDM.2015.PS-1-20L