Influence of in-situ Sb-Doping on Crystalline and Electrical Characteristics of n-type Ge1-xSnx Epitaxial Layer

J. Jeon

doi:https://doi.org/10.7567/SSDM.2015.PS-1-9

[PS-1-9] Influence of in-situ Sb-Doping on Crystalline and Electrical Characteristics of n-type Ge_1-xSn_x Epitaxial Layer

^○J. Jeon¹, T. Asano^1,2, W. Takeuchi¹, M. Kurosawa^1,3, O. Nakatsuka¹, S. Zaima^1,3 (1.Nagoya Univ., 2.Res. Fellow of the Japan Society for the Promotion of Sci., 3.EcoTopia Sci. Inst., Nagoya Univ.(Japan))

https://doi.org/10.7567/SSDM.2015.PS-1-9

2015 International Conference on Solid State Devices and Materials

[PS-1-9] Influence of in-situ Sb-Doping on Crystalline and Electrical Characteristics of n-type Ge1-xSnx Epitaxial Layer

[PS-1-9] Influence of in-situ Sb-Doping on Crystalline and Electrical Characteristics of n-type Ge_1-xSn_x Epitaxial Layer