Improvement of Filter-less Fluorescence Sensor by the Surface Planarization of Polysilicon Photogate

Y. J. Choi

doi:https://doi.org/10.7567/SSDM.2015.PS-11-13L

[PS-11-13L] Improvement of Filter-less Fluorescence Sensor by the Surface Planarization of Polysilicon Photogate

^○Y. J. Choi¹, K. Takahashi¹, M. Matsuda¹, T. Hizawa¹, Y. Moriwaki¹, F. Dasai¹, Y. Kimura¹, I. Akita¹, T. Iwata¹, M. Ishida¹, K. Sawada¹ (1.Toyohashi Univ. of Tech.(Japan))

https://doi.org/10.7567/SSDM.2015.PS-11-13L

2015 International Conference on Solid State Devices and Materials

[PS-11-13L] Improvement of Filter-less Fluorescence Sensor by the Surface Planarization of Polysilicon Photogate