The Japan Society of Applied Physics

[PS-11-2] Temperature-Lowered Plasma Treatment by Controlling Direction of Supplying Reactive Species for Biological Application

Y. Nakayama1, S. Kumagai1, H. Hashizume2, T. Ohta3, M. Ito3, M. Hori2, M. Sasaki1 (1.Toyota Tech. Inst., 2.Nagoya Univ., 3.Meijo Univ.(Japan))

https://doi.org/10.7567/SSDM.2015.PS-11-2