XPS Study of HfO<sub>2</sub> Growth on 2H-MoS<sub>2</sub> Substrate

C. P. Chen

doi:https://doi.org/10.7567/SSDM.2015.PS-13-14

2015 International Conference on Solid State Devices and Materials

Sep 27, 2015 - Sep 30, 2015
Sapporo Convention Center, Sapporo, Japan

[PS-13-14] XPS Study of HfO₂ Growth on 2H-MoS₂ Substrate

^○C. P. Chen¹, S. W. Ong², J. W. Chai³, Z. Zhang³, S. J. Wang³, J. S. Pan³, E. S. Tok^1,2 (1.National Univ. of Singapore, 2.Yale-NUS College, 3.Inst. of Material Res. and Eng.(Singapore))

https://doi.org/10.7567/SSDM.2015.PS-13-14

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2015 International Conference on Solid State Devices and Materials

[PS-13-14] XPS Study of HfO2 Growth on 2H-MoS2 Substrate

[PS-13-14] XPS Study of HfO₂ Growth on 2H-MoS₂ Substrate