The Japan Society of Applied Physics

[PS-13-14] XPS Study of HfO2 Growth on 2H-MoS2 Substrate

C. P. Chen1, S. W. Ong2, J. W. Chai3, Z. Zhang3, S. J. Wang3, J. S. Pan3, E. S. Tok1,2 (1.National Univ. of Singapore, 2.Yale-NUS College, 3.Inst. of Material Res. and Eng.(Singapore))

https://doi.org/10.7567/SSDM.2015.PS-13-14