The Japan Society of Applied Physics

[PS-14-12] Photoemission Spectroscopy Measurements of p+-Si/n-SiC and n+-Si/n-SiC Junctions by Surface Activated Bonding

N. Shigekawa1, J. Liang1, M. Shingo2, M. Arai3, K. Shiojima2 (1.Osaka City Univ., 2.Univ. of Fukui, 3.New Japan Radio Co., Ltd.(Japan))

https://doi.org/10.7567/SSDM.2015.PS-14-12