The Japan Society of Applied Physics

[PS-14-14] Heteroepitaxial Growth of Diamond on 3C-SiC/Si Substrates by Antenna-Edge Microwave Plasma CVD

T. Suto1, J. Yaita1,2, T. Iwasaki1,2,3, M. Natal4, S. E. Saddow4, M. Hatano1,2,3 (1.Tokyo Tech, 2.JST-CREST, 3.JST-ALCA, 4.Univ. of South Florida(Japan))

https://doi.org/10.7567/SSDM.2015.PS-14-14