Proposal of a Simple MEMS Phase Shifter Based on Effective Dielectric Constant Modulation

D. Nakano

doi:https://doi.org/10.7567/SSDM.2015.PS-2-2

2015 International Conference on Solid State Devices and Materials

Sep 27, 2015 - Sep 30, 2015
Sapporo Convention Center, Sapporo, Japan

[PS-2-2] Proposal of a Simple MEMS Phase Shifter Based on Effective Dielectric Constant Modulation

^○D. Nakano¹, M. Mori¹, K. Maezawa¹, H. Ishii², H. Ando³ (1.Univ. of Toyama, 2.Toyohashi Univ. of Tech., 3.National Inst. of Tech., Toyota College(Japan))

https://doi.org/10.7567/SSDM.2015.PS-2-2

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