The Japan Society of Applied Physics

[PS-2-2] Proposal of a Simple MEMS Phase Shifter Based on Effective Dielectric Constant Modulation

D. Nakano1, M. Mori1, K. Maezawa1, H. Ishii2, H. Ando3 (1.Univ. of Toyama, 2.Toyohashi Univ. of Tech., 3.National Inst. of Tech., Toyota College(Japan))

https://doi.org/10.7567/SSDM.2015.PS-2-2