The Japan Society of Applied Physics

[PS-2-3] Study on Ti/Au Two-Layered Cantilevers with Different Aspect Ratio for MEMS Devices

M. Teranishi1,2, T. F. M. Chang1,2, C. Y. Chen1,2, T. Konishi3, K. Machida1,2,3, H. Toshiyoshi1,4, D. Yamane1,2, K. Masu1,2, M. Sone1,2 (1.JST-CREST, 2.Tokyo Tech, 3.NTT Adv. Tech. Corp., 4.Univ. of Tokyo(Japan))

https://doi.org/10.7567/SSDM.2015.PS-2-3