[PS-2-3] Study on Ti/Au Two-Layered Cantilevers with Different Aspect Ratio for MEMS Devices

^○M. Teranishi^1,2, T. F. M. Chang^1,2, C. Y. Chen^1,2, T. Konishi³, K. Machida^1,2,3, H. Toshiyoshi^1,4, D. Yamane^1,2, K. Masu^1,2, M. Sone^1,2 (1.JST-CREST, 2.Tokyo Tech, 3.NTT Adv. Tech. Corp., 4.Univ. of Tokyo(Japan))

https://doi.org/10.7567/SSDM.2015.PS-2-3