The Japan Society of Applied Physics

[PS-2-5] Local Stress Effect Due to Operation-Heating-Induced Adhesive Expansion on Transistor Performances in 3D IC

H. Kino1, H. Hashiguchi1, S. Tanikawa1, Y. Sugawara1, S. Ikegaya1, T. Fukusima1, M. Koyanagi1, T. Tanaka1 (1.Tohoku Univ.(Japan))

https://doi.org/10.7567/SSDM.2015.PS-2-5