[PS-2-5] Local Stress Effect Due to Operation-Heating-Induced Adhesive Expansion on Transistor Performances in 3D IC

^○H. Kino¹, H. Hashiguchi¹, S. Tanikawa¹, Y. Sugawara¹, S. Ikegaya¹, T. Fukusima¹, M. Koyanagi¹, T. Tanaka¹ (1.Tohoku Univ.(Japan))

https://doi.org/10.7567/SSDM.2015.PS-2-5