[PS-5-10] Discharging-Phototransistor-Integrated High-Voltage Si Photovoltaic Cells for Fast Driving of an Electrostatic MEMS Actuator by Wavelength Modulation

^○I. Mori¹, Y. Mita¹ (1.Univ. of Tokyo(Japan))

https://doi.org/10.7567/SSDM.2015.PS-5-10