[PS-5-11] Design and Characteristics of a MEMS Human Body Hardness Sensor Aimed to Diagnosis of Lesion Size

^○Y. Maeda¹, K. Terao¹, F. Shimokawa¹, H. Takao¹ (1.Kagawa Univ.(Japan))

https://doi.org/10.7567/SSDM.2015.PS-5-11