[PS-6-10] 2-Dimentional Characterization of Ion-Implantation Damage in GaN Schottky Contacts Using Scanning Internal Photoemission Microscopy

^○K. Shiojima¹, S. Murase¹, S. Yamamoto¹, T. Mishima², T. Nakamura² (1.Univ. of Fukui, 2.Hosei Univ.(Japan))

https://doi.org/10.7567/SSDM.2015.PS-6-10