The Japan Society of Applied Physics

[PS-6-20] Study on Electrical Performances of ZnO-TFTs with 3-D Finlike Channels Fabricated by Nanoimprint Lithography and Atomic Layer Deposition

H. J. H. Chen1, B. L. Yeh1, C. Y. Chiang2, T. N. Lee1, K. C. Hsieh2 (1.National Chi Nan Univ., 2.National Tsing Hua Univ.(Taiwan))

https://doi.org/10.7567/SSDM.2015.PS-6-20