[PS-6-20] Study on Electrical Performances of ZnO-TFTs with 3-D Finlike Channels Fabricated by Nanoimprint Lithography and Atomic Layer Deposition

^○H. J. H. Chen¹, B. L. Yeh¹, C. Y. Chiang², T. N. Lee¹, K. C. Hsieh² (1.National Chi Nan Univ., 2.National Tsing Hua Univ.(Taiwan))

https://doi.org/10.7567/SSDM.2015.PS-6-20